| 摘要 |
PROBLEM TO BE SOLVED: To provide a micromirror scanner in which a micromirror is always swung at a constant swing angle even when temperature varies. SOLUTION: The micromirror scanner 10 comprises: a micromirror device 1 provided with a swingably supported micromirror and electrodes for driving to swing the micromirror by electrostatic force; an AC power source 2 which applies an AC voltage between the electrodes; a light detection element 3 disposed at a predetermined position at which the reflected light L' of laser light L emitted toward the micromirror is scanned according to the swing of the micromirror; a calculation; and a control device 4 which detects the deviation of a timing at which the reflected light is detected with the light detection element from a predetermined timing, converts the detected deviation into the swing angular variation of the micromirror, and adjusts the value of the AC voltage to correct the converted swing angular variation. COPYRIGHT: (C)2006,JPO&NCIPI
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