| 摘要 |
PROBLEM TO BE SOLVED: To prevent a lowering in embedding of a core member in an optical waveguide provided in a solid-state image sensor to improve an incidence efficiency. SOLUTION: The core member of the optical waveguide 10 efficiently guides the light formed in a light receiving part 21 direction through a plurality of interlayer insulating films 3, 4, 5, 8 and a protective film 9 formed on the light receiving part 21 formed on a semiconductor substrate 1 and entering from an on-chip lens 13 to the light receiving part 21. Using a TiO distributed polyimide resin having a high refraction factor of 1.8 to 1.9 due to the TiO distribution as the core member prevents the lowering in embedding of the core member in the optical waveguide 10 and can improve the incidence efficiency to the light receiving part 21. COPYRIGHT: (C)2006,JPO&NCIPI
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