LAYER-BUILTING STRUCTURE OF THE NANOPARTICLE, AND A MANUFACTURING METHOD OF THE SAME

摘要

The nanoparticle structure includes: a substrate; and nanoparticles formed on the substrate, wherein the nanoparticles include silicide. The method of manufacturing the nanoparticle structure includes: forming an Si source layer to a predetermined thickness; forming nanoparticles using a predetermined metal and silicon; depositing the nanoparticles on the Si source layer; and growing the nanoparticles to form silicide. Nanoparticles having a desired size can be easily obtained by adjusting the thickness of the silicon source layer.