| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an FBAR, capable of being miniaturized, preventing the decline of mechanical strength and suppressing the degradation in the resonance characteristics of the FBAR. <P>SOLUTION: The manufacturing method of the FBAR comprises a step of forming a lower electrode 20 above a hollow part on a substrate provided with the hollow part; a step of forming a piezoelectric film 22 on the surface of the lower electrode 20; a step of forming an upper electrode 24 facing the lower electrode 20 so as to hold the piezoelectric film 22 therebetween; a step of forming an opening 30 reaching the hollow part on the substrate; and a step of forming a void by removing a substrate part below the lower electrode 20 via the opening 30 and the hollow part. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
