| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump which can improve performance such as an exhaust, compression, or the like of the pump, and minimize a miniaturization and required power of the pump even when a rotor or stator becomes high temperature. SOLUTION: In the vacuum pump in which a pair of rotors 74 with the multi-stage arrangement of a plurality of lobes 72 along axial direction are set in parallel each other inside a pump casing 76 by setting the lobes 72 in proximity each other, the pump casing 76 comprises a casing 76d which moves freely in an axial direction of the rotor 74 and constitutes a gas exhausting portion between the lobes 72 by surrounding a periphery of the lobes 72, and has distance adjusting mechanisms 88, 99 which adjust a distance along the axial direction of the rotor 74 between the lobes 72 and the casing 76d in such a way that the casing 76d is transferred along the axial direction of the rotor 74 during a rotation of the rotor 74. COPYRIGHT: (C)2006,JPO&NCIPI
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