发明名称 |
Probe head and method of fabricating the same |
摘要 |
A probe head includes a sensor unit having: as sensor which records or reads data on or from a predetermined medium; first and second shields disposed on both sides of the sensor at a predetermined distance from each other; and first and second intermediate layers respectively interposed between the sensor and the first shield, and the sensor and the second shield. A method of fabricating the probe head includes: providing a substrate; forming an insulating layer on the substrate; forming a first shield on the insulating layer; forming a first intermediate layer on the first shield; forming a sensor on the first intermediate layer; forming a second intermediate layer on the sensor; forming a second shield on the second intermediate layer; and forming a protective layer on the second shield.
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申请公布号 |
US2006180881(A1) |
申请公布日期 |
2006.08.17 |
申请号 |
US20050285281 |
申请日期 |
2005.11.23 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
NAM YUN-WOO;KIM YONG-SU |
分类号 |
G03F1/00;G11B9/14;H01L21/00;H01L29/82 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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