发明名称 Probe head and method of fabricating the same
摘要 A probe head includes a sensor unit having: as sensor which records or reads data on or from a predetermined medium; first and second shields disposed on both sides of the sensor at a predetermined distance from each other; and first and second intermediate layers respectively interposed between the sensor and the first shield, and the sensor and the second shield. A method of fabricating the probe head includes: providing a substrate; forming an insulating layer on the substrate; forming a first shield on the insulating layer; forming a first intermediate layer on the first shield; forming a sensor on the first intermediate layer; forming a second intermediate layer on the sensor; forming a second shield on the second intermediate layer; and forming a protective layer on the second shield.
申请公布号 US2006180881(A1) 申请公布日期 2006.08.17
申请号 US20050285281 申请日期 2005.11.23
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 NAM YUN-WOO;KIM YONG-SU
分类号 G03F1/00;G11B9/14;H01L21/00;H01L29/82 主分类号 G03F1/00
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