VACUUM PROCESSING APPARATUS AND METHOD OF USING THE SAME,申请号KR20060012459-传众专利搜索

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发明名称	VACUUM PROCESSING APPARATUS AND METHOD OF USING THE SAME
摘要
申请公布号	KR20060090760(A)	申请公布日期	2006.08.16
申请号	KR20060012459	申请日期	2006.02.09
申请人	TOKYO ELECTRON LIMITED	发明人	SAITO MISAKO;HAYASHI TERUYUKI;KOMIYA TAKAYUKI
分类号	H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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