| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas sensor capable of achieving high response and high precision at the same time, for example, in a heat conduction type gas sensor using a heat generating detection element manufactured by a micromachine technology. SOLUTION: The gas sensor is composed of a perforated cap for covering the detection element and a case 4 provided with four gas inlet ports 8 having the same diameter which are provided to the places symmetric with respect to the center of the hole 9 of the perforated cap at positions that do not face the hole 9 of the perforated cap. The value calculated by dividing the diameter of the hole 9 by the diameter of each of the gas inlet ports 8 is 1.5-3.5 and the value calculated by dividing the value, which is calculated by subtracting the radius of the hole 9 and the radius of each of the radii of the gas inlet ports 8 from the distance between the center of the hole 9 and the center of each of the gas inlet ports 8, by the diameter of the hole 9 is set to 0-0.2. With this constitution, gas to be detected can immediately be diffused to the detection element; and since the output of the gas sensor is not affected by a charge in the flow rate of the gas to be detected around the gas sensor, the gas sensor of high accuracy with very high response and reduced in the dependence of the flow rate of the gas to be detected can be constituted. COPYRIGHT: (C)2006,JPO&NCIPI
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