| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection apparatus and a substrate inspection method capable of more simply allocating a recipe appropriate for the content of inspection. SOLUTION: An operation unit 2 outputs a signal based on the operation of an inspector. A storage unit 5 stores recipe information for each type that defines the content of inspection processes of a semiconductor substrate. A control unit 4 reads the recipe information of the type specified by the inspector based on the signal outputted from the operation unit 2 to allocate the content of the read recipe information collectively to a plurality of substrates for each type as a processing unit, thus generating new recipe information. COPYRIGHT: (C)2006,JPO&NCIPI
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