摘要 |
PROBLEM TO BE SOLVED: To provide a metal mask which is excellent in printability and durability (wear resistance). SOLUTION: The metal mask 20 is excellent in printability when a solder paste or the like are used. A ceramic treated film 18 is formed on a surface of a metal mask main body 16 by a PVD (a physical vaporization method) and a CVD (a chemical vaporization method) of a reaction forming type ion plating or the like. The forming material of the ceramic treated film 18 is a nitride or the like in which a solid lubricant of a fluororesin or the like are contained. COPYRIGHT: (C)2006,JPO&NCIPI |