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发明名称
METHOD AND APPARATUS FOR DETECTING BACKSIDE PARTICLE DURING WAFER PROCESSING
摘要
申请公布号
KR20060088379(A)
申请公布日期
2006.08.04
申请号
KR20050009253
申请日期
2005.02.01
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
PARK, SEUNG BAE;PARK, JAE SUNG
分类号
H01L21/205;H01L21/203;H01L21/66;H01L21/68
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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