| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic detector element that is small in size and superior in sensitivity for a flux gate sensor or a magnetic impedance element, by laminating the magnetic thin film and a flat surface coil on a non-magnetic substrate. SOLUTION: The magnetic sensor element comprises a magnetic thin film 12 of a magnetic substance formed on the single non-magnetic substrate; and the spiral flat coils 14 for impressing bias field or extracting the induced output to/from the magnetic thin film. The magnetic thin film is arranged across the center part of the spiral of the flat coil, and a high-frequency current is made to flow between the center of the spiral and end of the coil, or two spiral coils are serially connected in the same flat surfaces, and the interval between the centers of the two spiral coils is energized with the high-frequency current. COPYRIGHT: (C)2006,JPO&NCIPI
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