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发明名称
VERBESSERTE METHODE EINE OXIDSCHICHT ZU ÄTZEN
摘要
申请公布号
DE69835032(D1)
申请公布日期
2006.08.03
申请号
DE19986035032
申请日期
1998.12.11
申请人
LAM RESEARCH CORP.
发明人
BUI-LE, QUYNH;ARIMA, Y.
分类号
H01L21/302;H01L21/311;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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