| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent any contact failure such as peel-off, disconnection or the like occurring at an electric connection point of a piezoresistive element and a wire in a contact hole. <P>SOLUTION: A piezoresistive triaxial acceleration sensor is provided which comprises a weight section, a base section 51 disposed around the weight section, a circumference stationary section 42 fixed on the base section 51, and a beam section 44 for making the weight section coupled flexibly to the circumference stationary section 42. One piezoresistive element 45-1 is disposed on a region over a boundary line P11 of the beam section 44 and the circumference stationary section 42, and the other piezoresistive element is disposed on a region over a boundary line of the beam section 44 and the weight section. Joint sections 46-1, 46-2 are formed at both edges of each piezoresistive element 45-1, and these joint sections 46-1, 46-2 are connected electrically to wires 48 in a plurality of contact holes 47a serially arranged on the upper layer thereof. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
