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发明名称
AN ION BEAM NEUTRALIZING APPARATUS
摘要
申请公布号
KR20060087011(A)
申请公布日期
2006.08.02
申请号
KR20050007667
申请日期
2005.01.27
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
JEON, YUN KWANG;KIM, JUNG WOOK
分类号
H01L21/205;H01L21/3065
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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