发明名称 BUMP STRUCTURE OF SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 In connection with a bump of a semiconductor device and a manufacturing method thereof, a groove is formed in a bump pad region of a semiconductor substrate. An under bump metal layer is then formed in the groove, and a lower end portion of the bump fills the groove on the under bump metal layer.
申请公布号 KR20060087131(A) 申请公布日期 2006.08.02
申请号 KR20050007984 申请日期 2005.01.28
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KO, YOUNG PIL
分类号 H01L21/60 主分类号 H01L21/60
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