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发明名称
摘要
申请公布号	JP2006517740(A)	申请公布日期	2006.07.27
申请号	JP20060502856	申请日期	2004.01.16
申请人		发明人
分类号	H01L21/683;C23C16/00;C23C16/458;H01L21/00;H01L21/31;H01L21/687;H02N13/00;H05B3/14	主分类号	H01L21/683
代理机构		代理人
主权项
地址

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