BOARD TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a board treatment apparatus which contributes to reduction of costs for equipment by reducing a floor surface required for installation and carrying a board in an inclined posture by a simple mechanism. SOLUTION: After the board is treated by a first treatment part 20, a carrying direction changing part 40 changes the carrying direction of the board, and its inclined carrying part 49 carries the board to a second carrying path 43 nearly keeping the inclined posture made by the inclination of the first carrying path 41. A liquid supplying part supplies a treatment liquid to the main surface of the board B carried by the inclined carrying part 49. The second carrying path 43 and a second treatment part 30 treats the board whose inclined posture is kept by the inclined carrying part 49, by carrying the board in a direction reverse to the first treatment part 20 without changing the posture. COPYRIGHT: (C)2006,JPO&NCIPI