IMPROVED SYSTEMS AND METHODS FOR WAFER TRANSLATION

摘要

A two-axis automation system (100) can be used to transfer and rotate wafers between horizontal and vertical orientations necessary for differing steps in a semiconductor fabrication process. The two rotational axes (104, 106) allow for the transfer and rotation to be done in a minimal space and with a minimum amount of swept volume. A transfer arm (102) of the automation system (100) can include a pair of load pads (300, 302) capable of loading and unloading a wafer processing chamber in a single sweep.