POST-RELEASE CAPACITANCE ENHANCEMENT IN MICROMACHINED DEVICES AND A METHOD OF PERFORMING THE SAME

摘要

A MEMS device which utilizes a capacitive sensor or actuator is enhancement by initially fabricating the capacitive assembly which comprises the sensor or actuator as two sets of interdigitated fingers in a noninterdigitated configuration. One of the two sets of fingers is coupled to a movable stage. The stage is moved from an initial position to a post-release position in which the two sets of interdigitated fingers are interdigitated with each other. The stage is carried by two pairs flexures which maintain the stability of motion of the stage and when in the post-release position provide stiffness which prevents deflection of the set of fingers coupled to the stage. The stage and hence the assembled sets of fingers are then locked into the post-release position.