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发明名称
VAPOR DEPOSITION SOURCE AND EVAPORATING APPARATUS AND METHOD FOR DEPOSITION USING THE SAME
摘要
申请公布号
KR20060084042(A)
申请公布日期
2006.07.21
申请号
KR20050004301
申请日期
2005.01.17
申请人
SAMSUNG SDI CO., LTD.
发明人
LEE, KYU SUNG;KIM, HAN KI;KIM, MYOUNG SOO
分类号
C23C14/24
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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