| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a zirconia compact tool material which can retain satisfactory strength, even after firing an electronic component for a long time at a high temperature around 1,600°C, and causes little contamination of the electronic component etc., which is the firing target, and its manufacturing method. <P>SOLUTION: The zirconia compact tool material which hardly reacts with the electronic component at a high temperature around 1,600°C and retains satisfactory strength even after long-term use is obtained by mixing a yttria-stabilized zirconia raw material, molding it and firing it at a high temperature. Here, the yttria-stabilized zirconia raw material comprising 3-10 mol% yttria is used either alone or mixed with other yttria-stabilized zirconia raw materials each comprising 3-10 mol% yttria. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
