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发明名称
Projektions- bzw. Beleuchtungssystem mit einem System zur Detektion einer Lampeninstabilität
摘要
申请公布号
DE69834764(D1)
申请公布日期
2006.07.20
申请号
DE19986034764
申请日期
1998.04.20
申请人
ASML HOLDING, N.V.
发明人
CREIGHTON, MICHAEL A.
分类号
G01J1/00;G03F7/20;H01L21/027
主分类号
G01J1/00
代理机构
代理人
主权项
地址
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