| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection method and a device of an irregular defect capable of acquiring high inspection performance without being influenced by the shape or the size of the irregular defect. <P>SOLUTION: This inspection method of the irregular defect has a noise removal process relative to an input image; a primary differential process for applying a primary differential filter in the four directions, namely, in the longitudinal direction, the lateral direction and two oblique directions, relative to a noise removed image; an absolute-value acquiring process for acquiring an absolute-value image from a primary differential image; a maximum-value acquiring process for acquiring a maximum-value image from each absolute-value image in the four directions; a binarization process for applying a prescribed threshold to the maximum-value image; a labeling process relative to a binary image; a domain extraction process for extracting a label A domain from a labeling image; an irregularity value operation process for operating an irregularity value which is a difference of pixel values in an irregularity domain and a non-irregularity domain in the label A domain; and a quality determination process for determining the quality of the label A domain based on the irregularity value. This device to which the method is applied is also provided. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
