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发明名称
ETCHING METHOD, PROGRAM, COMPUTER READABLE STORAGE MEDIUM AND PLASMA PROCESSING APPARATUS
摘要
申请公布号
KR20060082799(A)
申请公布日期
2006.07.19
申请号
KR20060002951
申请日期
2006.01.11
申请人
TOKYO ELECTRON LIMITED
发明人
KIKUCHI AKIHIRO;SAKAMOTO YUICHIRO;TSUNODA TAKASHI
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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