摘要 |
<P>PROBLEM TO BE SOLVED: To provide a visual inspection system which enables the simultaneous inspection of an inspection target from a plurality of directions. <P>SOLUTION: The visual inspection system 200 for performing the visual inspection of a substrate 2 is equipped with a surface imaging unit 80a for taking the surface image of the substrate 2, the slave PCs 140a and 140b provided so as to correspond to the surface imaging unit 80a to perform inspection on the basis of the image data of the substrate 2, a back imaging unit 80b for taking the image of the back of the substrate 2 and the slave PCs 140c and 140d provided so as to correspond to the back imaging unit 80b to perform inspection from the image data of the substrate 2. The slave PCs 140a-140d have libraries 143a-143d which house the front and back inspection data of the respective parts mounted on the substrate 2 to inspect the substrate 2 on the basis of the image data of the substrate 2 and the front and back inspection data. <P>COPYRIGHT: (C)2006,JPO&NCIPI |