| 摘要 |
PROBLEM TO BE SOLVED: To reduce the loss by expansion of the volume of a space in a passage connecting a check valve and a scroll chamber by rapid volume variation occurring after delivering compressed air. SOLUTION: The vacuum pump is provided with a through hole in a turning scroll, and the atmosphere from an outlet of a fixed scroll is delivered through the through hole. The shape of the outlet 11 of the fixed scroll is in the shape wherein generation of back flow can be reduced after delivering the atmosphere in the scroll chamber in a final stage of a compression process. Thereby, the volume variation of the scroll chamber in the final stage of the compression process or the volume of the moving atmosphere is the volume of the through hole part, and the volume is smaller than the volume variation of the scroll chamber in the final stage of the compression process or the volume of the moving atmosphere of the conventional one. Therefore, generation of heat, lowering of efficiency of the vacuum pump, and increase of power consumption can be prevented compared to the conventional one. COPYRIGHT: (C)2006,JPO&NCIPI
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