发明名称 SUPPORTING FRAME, CLEANING AND DRYING APPARATUS, AND CUTTING MACHINE FOR WORKPIECE
摘要 PROBLEM TO BE SOLVED: To provide a cleaning and drying apparatus for a workpiece cleaning and drying uniformly all over the workpiece. SOLUTION: The apparatus comprises: a workpiece transporting mechanism which transports a cut workpiece supporting frame 2 with changing the position of the frame from horizontal position to vertical position; and a cleaning and drying mechanism which washes and dries the workpiece W as fixing the frame 2 in the vertical position and moving a cleaning nozzle 29 and a drying nozzle 30 after closing a cleaning and drying chamber 16, where the workpiece supporting frame 2 is placed by the transporting mechanism. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006186296(A) 申请公布日期 2006.07.13
申请号 JP20050112083 申请日期 2005.04.08
申请人 APIC YAMADA CORP 发明人 OGUCHI TATSUJI;TAGAMI SHUSAKU;UCHIYAMA SHIGEYUKI;ANDO SHUJI
分类号 H01L21/673;F26B9/06;H01L21/304 主分类号 H01L21/673
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