发明名称 |
SUPPORTING FRAME, CLEANING AND DRYING APPARATUS, AND CUTTING MACHINE FOR WORKPIECE |
摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning and drying apparatus for a workpiece cleaning and drying uniformly all over the workpiece. SOLUTION: The apparatus comprises: a workpiece transporting mechanism which transports a cut workpiece supporting frame 2 with changing the position of the frame from horizontal position to vertical position; and a cleaning and drying mechanism which washes and dries the workpiece W as fixing the frame 2 in the vertical position and moving a cleaning nozzle 29 and a drying nozzle 30 after closing a cleaning and drying chamber 16, where the workpiece supporting frame 2 is placed by the transporting mechanism. COPYRIGHT: (C)2006,JPO&NCIPI |
申请公布号 |
JP2006186296(A) |
申请公布日期 |
2006.07.13 |
申请号 |
JP20050112083 |
申请日期 |
2005.04.08 |
申请人 |
APIC YAMADA CORP |
发明人 |
OGUCHI TATSUJI;TAGAMI SHUSAKU;UCHIYAMA SHIGEYUKI;ANDO SHUJI |
分类号 |
H01L21/673;F26B9/06;H01L21/304 |
主分类号 |
H01L21/673 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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