FOCUS RING ARRANGEMENT FOR SUBSTANTIALLY ELIMINATING UNCONFINED PLASMA IN A PLASMA PROCESSING CHAMBER,申请号KR20007014593-传众专利搜索

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发明名称	FOCUS RING ARRANGEMENT FOR SUBSTANTIALLY ELIMINATING UNCONFINED PLASMA IN A PLASMA PROCESSING CHAMBER
摘要
申请公布号	KR100600898(B1)	申请公布日期	2006.07.13
申请号	KR20007014593	申请日期	2000.12.22
申请人		发明人
分类号	H01J37/32	主分类号	H01J37/32
代理机构		代理人
主权项
地址

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