发明名称 Imprint lithography
摘要 An imprinting method is provided that, according to an embodiment, involves contacting an imprintable medium on a substrate with a template to define an imprint area in the medium, removing at least some of any imprintable medium present outside the imprint area, and separating the template from the medium.
申请公布号 US2006150849(A1) 申请公布日期 2006.07.13
申请号 US20040025605 申请日期 2004.12.30
申请人 ASML NETHERLANDS B.V. 发明人 VAN SANTEN HELMAR;KOLESNYCHENKO ALEKSEY Y.
分类号 B41F33/00 主分类号 B41F33/00
代理机构 代理人
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