| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To realize an infrared gas analyzer capable of performing accurate measuring operation by removing the influence of external vibration added to the infrared gas analyzer, and an output compensation method therefor. <P>SOLUTION: The analyzer has a sample cell for distributing a sample gas and is adapted to detect the concentration of a measurement object component in the sample gas, using the change in absorption quantity of infrared ray passed through the sample cell. The analyzer further comprises a gas passage having a distributing passage part for distributing the detecting gas in a right-angled direction, and first and second thermal flow sensors arranged in different positions in the distributing direction within the gas passage with the directions being neatly arranged. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
