发明名称 Method and apparatus for undocking substrate pod with door status check
摘要 A pod loading station includes a docking mechanism adapted to move a pod between a docked position and an undocked position, and a door opener adapted to unlatch and open a pod door from the pod. A controller is coupled to the docking mechanism and the door opener and is programmed to cause the pod to move from the docked position to the undocked position, and then to cause the pod to move back to the docked position so that it can be determined whether the pod door is properly closed prior to completing the removal of the pod from the pod loading station.
申请公布号 US7074000(B2) 申请公布日期 2006.07.11
申请号 US20020335225 申请日期 2002.12.31
申请人 APPLIED MATERIALS, INC. 发明人 ENGLHARDT ERIC A.
分类号 H01L21/677;B65G49/07 主分类号 H01L21/677
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