Micromechanical sensor element, especially for measuring fluid properties, has a surface structure that is to be placed in the fluid to be measured that includes a drainage structure for the deflection of dirt and impurities

摘要

Device has a micromechanical, especially a semiconductor, sensor element, whose surface is at least partially placed in a medium whose state or parameters are to be measured. The surface of the sensor element has a drainage structure (360, 370, 460, 560) for drainage away of particles, impurities and liquids. An independent claim is made for a method of manufacture for a micromechanical sensor element in which a surface of the element is provided with a drainage structure.