| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a platy body, in which the solidification/growth speed is uniform, and to provide a method for manufacturing the platy body. SOLUTION: In the apparatus 1 for manufacturing the platy body, a crucible 2 is provided for storing a silicon melt 7 is provided, and a heater 3 for maintaining the temperature of the silicon melt 7 is arranged around the crucible 2. The crucible 2 is mounted on a crucible stand 6 and moved in the up-and-down-direction by a stage 10 for raising and lowering the crucible 2. A heat-insulating member 8 is arranged at a lower part of the crucible stand 6. Substrates 12 each being dipped into the silicon melt 7 for growing a platy silicon 20 and a transporting section 16 for transporting the substrates 12 are arranged at upper parts of the crucible 2. A plurality of on-edge heaters 4 are arranged at the edge surface of the opening part of the crucible 2. The on-edge heaters 4 and the heater 3 are connected to a control section 5, and set so as to heat to prescribed temperatures. COPYRIGHT: (C)2006,JPO&NCIPI
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