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发明名称
METHOD FOR ETCHING THE DIELECTRIC LAYER OF FLASH MEMORY DEVICE
摘要
申请公布号
KR20060077043(A)
申请公布日期
2006.07.05
申请号
KR20040115684
申请日期
2004.12.29
申请人
DONGBU ELECTRONICS CO., LTD.
发明人
AN, HYO SANG
分类号
H01L21/3065;H01L27/115
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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