ELECTROSTATIC CHUCK HAVING DOUBLE FLAT ZONES,申请号KR20040113986-传众专利搜索

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发明名称	ELECTROSTATIC CHUCK HAVING DOUBLE FLAT ZONES
摘要
申请公布号	KR20060075231(A)	申请公布日期	2006.07.04
申请号	KR20040113986	申请日期	2004.12.28
申请人	KOMICO LTD.	发明人	JUNG, SUNG MO
分类号	H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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