| 摘要 |
A probe mark reading device for reading probe marks stormed on electrode pads of semi conductor chips contained in a semiconductor wafer ( 90 ), comprising a CCD camera ( 20 ) for taking an image of the semiconductor wafer ( 90 ) and outputting the image as an image signal Si, an optical unit ( 21 ) for optically enlarging a location to be photographed by the CCD camera ( 20 ), a light source ( 30 ) for illuminating the location to be photographed by the CCD camera ( 20 ) with a flash of light generated for a short period of time from when a flash signal Sf is provided, an X-Y stage ( 40 ) capable of changing a position to be photographed by the CCD camera ( 20 ) based on a motor control signal Sm by moving a mounted semiconductor wafer ( 90 ) in an X-direction and a Y-direction, and a computer ( 10 ) for providing control and saving the images after receiving and trimming the image signal Si. With the above configuration, it is possible to read probe marks in a short time without a user having to expend much time or effort.
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