| 摘要 |
In accordance with various embodiments, there is an exposure system for writing a pattern on a photosensitive material. The exposure system can include a waveguide array and a light modulator. The waveguide array can include a plurality of optical fibers that focuses light on the radiation sensitive material. The light modulator can modulate the light coupled into the plurality of optical fibers. Exemplary exposure systems can reduce aberrations due to coma and distortion, and provide improved alignment. |
