ULTRASHORT PULSE LASER PROCESSING METHOD

摘要

There is disclosed a laser processing method for processing an article to be processed by using an ultrashort pulse laser, wherein a laser pulse is set to a fluence not more than a single-shot processing threshold fluence which is a fluence processing threshold value at the time of one pulse irradiation, and a plurality of shots of the thus set laser pulse are then applied to the article to be processed (6).