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发明名称
APPARATUS FOR CLEANING WAFER
摘要
申请公布号
KR20060072233(A)
申请公布日期
2006.06.28
申请号
KR20040110631
申请日期
2004.12.22
申请人
DONGBU ELECTRONICS CO., LTD.
发明人
LEE, IL HO
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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