| 摘要 |
A probe for a scanning probe microscope and a method for fabricating the probe is provided that can perform accurate measurement without a base of a cantilever having contact with an object to be measured and without the object being hidden by the base of the probe. The probe for a scanning probe microscope includes a base, a support cantilever (21, 31) horizontally extending from the base, and a measuring cantilever (22, 32) provided at the top end of the support cantilever (21, 31) and having a length less than or equal to 20 micrometers and a thickness less than or equal to 1 micrometer. |
