PRECISE PATTERNING OF HIGH-K FILMS,申请号KR20040060505-传众专利搜索

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发明名称	PRECISE PATTERNING OF HIGH-K FILMS
摘要
申请公布号	KR100592841(B1)	申请公布日期	2006.06.26
申请号	KR20040060505	申请日期	2004.07.30
申请人		发明人
分类号	H01L21/3063;H01L21/28;H01L21/311	主分类号	H01L21/3063
代理机构		代理人
主权项
地址

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