MOCK WAFER, SYSTEM CALIBRATED USING MOCK WAFER, AND METHOD FOR CALIBRATING AUTOMATED TEST EQUIPMENT,申请号KR20050123974-传众专利搜索

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发明名称	MOCK WAFER, SYSTEM CALIBRATED USING MOCK WAFER, AND METHOD FOR CALIBRATING AUTOMATED TEST EQUIPMENT
摘要
申请公布号	KR20060069303(A)	申请公布日期	2006.06.21
申请号	KR20050123974	申请日期	2005.12.15
申请人	AGILENT TECHNOLOGIES, INC.	发明人	MAYDER ROMI
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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