ACCELERATION SENSOR AND METHOD OF MANUFACTURING ACCELERATION SENSOR,申请号KR20040082982-传众专利搜索

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发明名称	ACCELERATION SENSOR AND METHOD OF MANUFACTURING ACCELERATION SENSOR
摘要	<p>An acceleration sensor includes a semiconductor substrate, a sensing element formed on the semiconductor substrate, a bonding frame made of polysilicon which is formed on the semiconductor substrate and surrounds the sensing element, and a glass cap which is bonded to a top surface of the bonding frame made of polysilicon to cover the sensing element above the sensing element while being spaced by a predetermined distance from the sensing element. The bonding frame made of polysilicon is not doped with any impurity.</p>
申请公布号	KR100589709(B1)	申请公布日期	2006.06.19
申请号	KR20040082982	申请日期	2004.10.18
申请人		发明人
分类号	G01P15/00;G01P15/08;G01P15/125;H01L23/12;H01L29/84	主分类号	G01P15/00
代理机构		代理人
主权项
地址

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