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发明名称
CMP POLISHING PAD HAVING GROOVES ARRANGED TO IMPROVE POLISHING MEDIUM UTILIZATION
摘要
申请公布号
KR20060067139(A)
申请公布日期
2006.06.19
申请号
KR20050114709
申请日期
2005.11.29
申请人
ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC.
发明人
MULDOWNEY GREGORY P.
分类号
H01L21/304;B24D99/00
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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