| 摘要 |
A method of making a solid state image sensor having a color filter array with color filter elements having a plurality of different types of colored pixels embedded in a planar surface, the method includes providing a first transparent layer covering the pixels; making the first transparent layer optically planar by chemical mechanical polishing; and uniformly depositing a second transparent etch-stop layer over the first transparent layer. The method further includes uniformly depositing a third support layer over the second transparent etch-stop layer which is made of a different material than the second transparent etch-stop layer; etching openings into the third support layer in regions where color filter elements are desired to be formed; conformably coating a photoresist layer in the openings on the top surface of the second transparent etch-stop layer and on the top surface of the third support layer; patterning the photoresist layer to remove portions of the photoresist layer corresponding to the first type of colored pixels; coating the photoresist layer and the second transparent etch-stop layer in the patterned opening portions with color filter material of the first color type corresponding to the first type of colored pixels; removing the first type of color filter material from positions where it was coated over the photoresist layer.
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