发明名称 |
STRUCTURE VIBRANTE MICRO-USINEE ET MICROGYROMETRE ASSOCIE |
摘要 |
<p>The structure has an anchoring end (5) integrated to a fixed support (6), and a vibrating wall (7) comprising a base (8) and a free end (9). Stationary or progressive waves are generated in the vibrating wall. A naturally uncoupled zone is located between the anchoring end and the free end of the vibrating wall. The anchoring end is constituted by the base of the vibrating wall. - An INDEPENDENT CLAIM is also included for a microgyrometer comprising a micro-machined vibrating structure.</p> |
申请公布号 |
FR2864226(B1) |
申请公布日期 |
2006.06.09 |
申请号 |
FR20030014973 |
申请日期 |
2003.12.19 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
DELEVOYE ELISABETH |
分类号 |
B81B3/00;G01C19/5691;H03H9/00;H03H9/02;H03H9/24 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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