| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a dry-surface cleaning apparatus capable of preventing the surface damage on a workpiece caused by directly irradiating the workpiece with plasma thermal radiation. <P>SOLUTION: The dry-surface cleaning apparatus includes a laser for generating laser beams, a focus lens 1 for generating a plasma shock wave 5 around a laser focus 3 by converging the laser beams 2 into the laser focus 3 around the workpiece 10 to be cleaned, wherein contaminants on the workpiece 10 are removed by colliding the plasma shock wave against the workpiece 10, and a thermal radiation protection means which is installed between the laser focus 3 and the workpiece 10 and prevents the surface damage on the workpiece 10 induced by the plasma thermal radiation 6 entailed by the generation of the plasma shock wave 5. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
