| 摘要 |
PROBLEM TO BE SOLVED: To improve frequency characteristics of laser performance such as a spectral ray width by minimizing an influence of a sound wave on discharge. SOLUTION: A porous sound absorber 49 having pores suitably attenuating a sound wave including high-frequency components of 100 to 300 kHz is provided in a laser chamber. The sound absorber attenuates and reflects a sound wave including high-frequency components of 100 to 300 kHz generated between main electrodes 14 and 15. A sound wave returning to between the main electrodes is therefore attenuated and then compressional variation of laser gas between the main electrodes becomes small. COPYRIGHT: (C)2006,JPO&NCIPI
|
