| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer device and a processing method for processing a workpiece in a vacuum, capable of freely transferring the workpiece in a three-dimensional space. SOLUTION: A chamber 1 for primarily transferring the disk-like workpiece in a vaccum atmosphere during its manufacture, has at least two opening parts 4 and 6 for passing the workpiece 22 and a large number of workpiece storage parts 20 rotatable around a shaft. A transfer mechanism 30b matched to the opening part 4 and independently journaled from the rotatable workpiece storage parts 20, is arranged in the chamber 1. The transfer mechanism 30b is controlled in the radial direction, and can be pulled out or pulled back, and acts on the workpiece in an opening part area. A chamber 2 has at least one workpiece storage part 52. The workpiece storage part 52 is arranged in a transfer mechanism 46. The transfer mechanism 46 is rotatingly driven around a shaft A<SB>44</SB>as a whole, and is linearly pulled out or pulled back. COPYRIGHT: (C)2006,JPO&NCIPI |
